|
|
Tabletop |
3D-300 |
3D-450 |
3D-600 |
| |
Standard |
Standard | 300-HP |
Standard | 450-HP |
Standard | 600-HP |
| X/Y Stage Type |
ATS115 |
AGS1000 | AGS15000 |
AGS1000 | AGS15000 |
AGS1000 | AGS15000 |
| Travel |
300mm × 150mm |
300mm × 300mm |
450mm × 450mm |
600mm × 600mm |
| X/Y Resolution |
±0.5µm |
±0.1µm | ±0.1µm |
±0.1µm | ±0.1µm |
±0.1µm | ±0.1µm |
| Repeatability |
±2µm |
±2µm | ±1µm |
±2µm | ±1µm |
±2µm | ±1µm |
| Accuracy |
±12µm |
±5µm | ±2µm |
±5µm | ±2µm |
±5µm | ±2µm |
| Maximum Travel Speed |
300 mm/s |
2 m/s (80 in/s) | 3 m/s (120 in/s) |
2 m/s (80 in/s) | 3 m/s (120 in/s) |
2 m/s (80 in/s) | 3 m/s (120 in/s) |
| Maximum Linear Acceleration |
1g–10 m/s2 (no-load) |
2g–20 m/s2 (no-load) | 3g–30 m/s2 (no-load) |
2g–20 m/s2 (no-load) | 3g–30 m/s2 (no-load) |
2g–20 m/s2 (no-load) | 3g–30 m/s2 (no-load) |
| Z Stage Type |
ATS115 |
ATS115 | ATS1000 |
ATS115 | ATS1000 |
ATS115 | ATS1000 |
| Z Travel
| 100mm |
100mm | 100mm |
100mm | 100mm |
100mm | 100mm |
| Resolution |
0.5µm |
0.5µm | 0.1µm |
0.5µm | 0.1µm |
0.5µm | 0.1µm |
| Repeatability |
±1µm |
±1µm | ±0.5µm |
±1µm | ±0.5µm |
±1µm | ±0.5µm |
| Accuracy |
±6µm |
±6µm | ±4µm |
±6µm | ±4µm |
±6µm | ±4µm |
| Maximum Travel Speed |
300 mm/s |
300 mm/s | 400 mm/s |
300 mm/s | 400 mm/s |
300 mm/s | 400 mm/s |
| Motion Base |
Aluminum base, risers, & bridge |
Aluminum base, risers, & bridge |
Aluminum base, risers, & bridge |
Aluminum base, risers, & bridge |
| Machine Frame |
Vendor Supplied |
Welded Steel |
Welded Steel |
Welded Steel |
| Digital I/O |
24 inputs, 24 outputs |
8 inputs, 8 outputs, PSO† |
8 inputs, 8 outputs, PSO† |
8 inputs, 8 outputs, PSO† |
| Analog I/O |
3 inputs (12-bit) 3 outputs (16-bit) |
4 inputs (12-bit) 2 outputs (16-bit) |
4 inputs (12-bit) 2 outputs (16-bit) |
4 inputs (12-bit) 2 outputs (16-bit) |